FIB Sample Preparation

Wednesday, October 30, 2024: 10:20 AM-12:00 PM
204 (Hilton San Diego Bayfront)
Dr. Cathy Vartuli, Vishay Siliconix Inc and Ms. Valerie Brogden, University of Oregon
10:20 AM
Targeted TEM SRAM-like Analysis Without Delayering
Dr. James Demarest, FASM, IBM; Mr. Brad Austin, IBM; Mr. Lukas Tierney, IBM Research; Mr. Zac Martin, Thermofisher
10:40 AM
Utilizing PFIB for preparing TEM lamellae tailored to high aspect ratio 3D NAND structures
Dr. Yu-Chih Chen, Macronix International Co., Ltd.; Mr. Zhao-Ling Wu, Macronix International Co., Ltd.; Mr. Bo-Hao Chiou, Macronix International Co., Ltd.; Dr. Hsin-Cheng Hsu, Macronix International Co., Ltd.; Dr. Chun-Hung Lin, Macronix International Co., Ltd.; Mr. Chin-Chih Yeh, Macronix International Co., Ltd.; Mr. Nan-Tzu Lian, Macronix International Co., Ltd.; Mr. Ta-Hone Yang, Macronix International Co., Ltd.; Mr. Kuang-Chao Chen, Macronix International Co., Ltd.
11:00 AM
Enhanced TEM specimen preparation for STEM-EBIC analysis using a Ga FIB system followed by post-FIB Ar ion beam milling
Dr. Cecile Bonifacio, E.A. Fischione Instruments, Inc.; Dr. William Hubbard, PhD, NanoElectronic Imaging, Inc.; Dr. Richard Wei-Chih Li, E.A. Fischione Instruments, Inc.; Ms. Mary Ray, E.A. Fischione Instruments, Inc.; Mr. Paul Fischione, E.A. Fischione Instruments, Inc.
11:20 AM
Flexible Application of Multi-Species Plasma-FIB in Failure Analysis Workflows
Ms. Melissa Mullen, Thermo Fisher Scientific; Dr. Adam Stokes, Thermo Fisher Scientific; Dr. Jared Johnson, Thermo Fisher Scientific; Mr. Andrew Lam, Thermo Fisher Scientific; Mr. Samuel Benson, Thermo Fisher Scientific
11:40 AM
Increasing TEM Prep Throughput with an Extendable Manipulator Tip
Ms. Valerie Brogden, University of Oregon; Mr. Jefferson Garman, CAMCOR, University of Orego; Mr. Kurt Langworthy, CAMCOR - University of Oregon; Mr. Steve Wiemholt, CAMCOR, University of Oregon
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