Temperature Sensitive Failure Characterization Using Thermal Nanoprobing

Friday, November 1, 2024: 8:20 AM
202 (Hilton San Diego Bayfront)
Mr. Zvika Sapir , Intel, Haifa, Israel
Dr. Avraham Raz , Intel, Haifa, Israel
Mr. Andin Orana , Thermo Fisher Scientific, Richardson, TX

Summary:

On this paper we will present 3 cases of thermal nanoprobing characterization on device and cell levels.