An innovative analytics platform for high resolution 3D ion imaging and SIMS nano-analytics with most precise sample navigation
An innovative analytics platform for high resolution 3D ion imaging and SIMS nano-analytics with most precise sample navigation
Thursday, October 31, 2024
Indigo Ballroom (Hilton San Diego Bayfront)
Summary:
Advanced techniques for material characterization with high lateral resolution and sensitivity are vital for nanoscale investigations. Cutting-edge Focused Ion Beam (FIB) technologies combined with Secondary Ion Mass Spectrometry (SIMS) allow for nanoscopic 3D structure visualization and analytical surface measurements. A novel system integrating a Liquid Metal Alloy Ion Source (LMAIS), magnetic sector SIMS, and laser interferometer stage provides high-resolution 2D/3D imaging and SIMS nano-analysis, enhancing understanding in materials science and semiconductor technology.
Advanced techniques for material characterization with high lateral resolution and sensitivity are vital for nanoscale investigations. Cutting-edge Focused Ion Beam (FIB) technologies combined with Secondary Ion Mass Spectrometry (SIMS) allow for nanoscopic 3D structure visualization and analytical surface measurements. A novel system integrating a Liquid Metal Alloy Ion Source (LMAIS), magnetic sector SIMS, and laser interferometer stage provides high-resolution 2D/3D imaging and SIMS nano-analysis, enhancing understanding in materials science and semiconductor technology.