An innovative analytics platform for high resolution 3D ion imaging and SIMS nano-analytics with most precise sample navigation

Thursday, October 31, 2024
Indigo Ballroom (Hilton San Diego Bayfront)
Dr. Peter Gnauck , Raith GmbH, Dortmund, NRW, Germany
Dr. Alexander Ost , Raith GmbH, Dortmund, Germany
Mr. Torsten Richter , Raith GmbH, Dortmund, Germany

Summary:

Advanced techniques for material characterization with high lateral resolution and sensitivity are vital for nanoscale investigations. Cutting-edge Focused Ion Beam (FIB) technologies combined with Secondary Ion Mass Spectrometry (SIMS) allow for nanoscopic 3D structure visualization and analytical surface measurements. A novel system integrating a Liquid Metal Alloy Ion Source (LMAIS), magnetic sector SIMS, and laser interferometer stage provides high-resolution 2D/3D imaging and SIMS nano-analysis, enhancing understanding in materials science and semiconductor technology.
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