The Impact of TEM Analysis Temperature and Deposition Layer Quality on Photoresist Profiles using Cryo-FIB and Cryo-TEM

Thursday, October 31, 2024

Indigo Ballroom (Hilton San Diego Bayfront)

Ms. Ji Hye Hyun , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)

Ms. Yanchao Dai , Thermo Fisher Scientific, Pudong, Shanghai, China

Mr. In Chang Choi , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)

Dr. Chris kang , Thermo Fisher Scientific, Yongin-si, Gyeonggi-do, Korea, Republic of (South)

Summary:

This paper presents the characteristic of the cryo-workflow on PR profiles using cryo-FIB and cryo-TEM.

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