Innovations in Beam-Based Defect Localization Methods for Advanced 3D Interconnects

Friday, November 1, 2024: 8:40 AM

204 (Hilton San Diego Bayfront)

Dr. Kristof J.P. Jacobs , imec, Leuven, Vlaams Brabant, Belgium

Mr. Toru Matsumoto , Hamamatsu Photonics K.K., Hamamatsu, Shizuoka, Japan

Mr. Shimpei Tominaga , Hamamatsu Photonics K.K., Hamamatsu, Shizuoka, Japan

Dr. Eric Beyne , Imec, Leuven, Belgium

Mr. Hirotoshi Terada , Hamamatsu Photonics K.K., Hamamatsu, Shizuoka, Japan