Using FIB grooving to prepare top-down-nanoprobed sample for site-specific cross-sectional nanoprobing analysis

Tuesday, October 29, 2024: 3:20 PM

204 (Hilton San Diego Bayfront)

Dr. S. L. Ting , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore

Mr. P. K. Tan , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore

Ms. T. T. Yu , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore

Mr. P.T. Ng , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore

Dr. C. Q. Chen , Globalfoundries Singapore Pte Ltd., Singapore, Singapore, Singapore