AFM-in-SEM for precise endpoint delayering
AFM-in-SEM for precise endpoint delayering
Wednesday, October 30, 2024: 3:00 PM
202 (Hilton San Diego Bayfront)
Summary:
A survey of AFM-in-SEM tomography of SRAMs is presented. A careful cut through an internal node of an SRAM, with and endpoint signal of electrical data, is presented.
A survey of AFM-in-SEM tomography of SRAMs is presented. A careful cut through an internal node of an SRAM, with and endpoint signal of electrical data, is presented.