Scanning Probe Analysis

Wednesday, October 30, 2024: 3:00 PM-4:00 PM

202 (Hilton San Diego Bayfront)

Mr. Phil Kaszuba, Globalfoundries and Dr. Daminda Dahanayaka, Globalfoundries

3:00 PM

AFM-in-SEM for precise endpoint delayering
Dr. Frank Hitzel, DoubleFox GmbH; Mr. Greg Johnson, Zeiss Microscopy

3:20 PM

Machine Learning for predicting DataCube Atomic Force Microscope (AFM): MultiDAT-AFM
Dr. Rosine COQ GERMANICUS, Normandie Univ, Ensicaen, Unicaen, CNRS, CRISMAT UMR6508; Mr. Othman EL-HASSANI, Normandie Univ, Ensicaen, Unicaen, CNRS, CRISMAT UMR6508

3:40 PM

Scanning Capacitance Microscopy Application for top-down sample failure analysis on SOI and Bulk Si wafer
Ms. ZIN NWE TUN, Globalfoundries; Mr. Ryan Sweeney, Globalfoundries; Mr. Kevin Davidson, Globalfoundries; Ms. Esther P.Y. Chen, Globalfoundries

See more of: Technical Program