Nanoprobing/Scanning Probe User Group Discussion
Nanoprobing/Scanning Probe User Group Discussion
Wednesday, October 30, 2024: 1:00 PM-2:00 PM
Moderators:Greg Johnson, Carl Zeiss AG
Nicholas Antoniou, KLA Corporation
Scott P. Lockledge, Tiptek, LLC
Nanoprobing and atomic force microscopy (AFM) are experiencing a resurgence in semiconductor process development and yield engineering. While these techniques have long been used for "direct" measurements—such as topography and electrical properties like current, voltage, and conductance at the device level—there is growing interest in their ability to provide deeper insights into device performance and junction structure. The 2024 ISTFA Nano/Scanning Probe Users Group meeting will kick off with a series of brief presentations showcasing the range of techniques in this domain. The session will conclude with an open forum for discussion.
See more of: Technical Program