Invited Talk: Andrew Jonathan Smith, Kleindiek Nanotechnik, presents, "Advances in SEM-based Nanoprobing Techniques".
Global Sales Manager
Kleindiek Nanotechnik
Title: “Advances in SEM-based Nanoprobing Techniques”
Abstract:
As semiconductor technologies advance and evolve, performing failure analysis can become more challenging. Addressing these challenges requires further development of existing nanoprobing techniques as well as the exploration of new in situ methods. In this work, we will present our most recent developments in nanoprobing workflows and report on recent work performed in the field of active probe analyses. The latter is especially important in light of the recent decision to move the devices' power delivery to the chip's back side, thereby blocking access for the visual inspection methods that are currently in use (e.g. Laser Voltage Probing). In the quest to locate defective transistors (e.g. devices with increased gate or via to gate resistance) an active high frequency probe may be a tool that would allow identifying faults without thermally stressing the devices under test. This and other methods will be described in this work.
Biography:
Andrew finished his undergraduate studies in chemistry at the Heinrich-Heine University Düsseldorf in 2005. He then moved to the Max-Planck-Institute for Iron Research (recently renamed to Max-Planck-Institute for Sustainable Materials) specializing in electrochemistry and completing his PhD in Chemistry while researching single crystalline metallic nanowires. During this time, he came in contact with Kleindiek Nanotechnik, as they provided a set of micromanipulators used to manipulate and characterize the nanowires.
After completing his PhD research in 2008, Andrew joined Kleindiek Nanotechnik's application and solutions development team while also taking on various sales and marketing roles.
Mr. David Albert, IBM (Supplemental) and Mr. John Sanders, Thermofisher