AI Applications for Failure Analysis - A Novel Approach to Multivariate Time-series Anomaly Detection and Correlation analysis for In-fab Metrology Data

Wednesday, November 19, 2025

Ms. Youngeun Kim , Samsung Electronics, Hwaseong-si, Gyeonggi-do, Korea, Republic of (South)

Mr. Hyunmin Kim , Samsung Electronics, Hwaseong-si, Gyeonggi-do, Korea, Republic of (South)

Mr. Hyoungjun Kim , Samsung Electronics, Hwaseong-si, Gyeonggi-do, Korea, Republic of (South)

See more of: Poster Session
See more of: Poster Session