Microscopy Analysis and Material Characterization - Multimodal In Situ Electron Microscopy Platform for Correlative Electro-Thermal Characterization and Failure Analysis

Wednesday, November 19, 2025
Dr. Hongkui Zheng , DENSsolutions, Irvine, CA
Dr. Yevheniy Pivak , DENSsolutions, Delft, Netherlands
Mr. Christian Deen-van Rossum , DENSsolutions, Delft, Netherlands
Dr. Mia Andersen , DENSsolutions, Delft, Netherlands
Merijn Pen , DENSsolutions, Delft, Netherlands
Shibabrata Basak , Institute of Energy Technologies - Fundamental Electrochemistry (IET-1), Forschungszentrum Jülich GmbH, Julich, NA, Germany
Rüdiger-A Eichel , Institute of Energy Technologies - Fundamental Electrochemistry (IET-1), Forschungszentrum Jülich GmbH, Julich, NA, Germany
Hugo Pérez Garza , DENSsolutions, Delft, Netherlands

Summary:

We present a correlative in situ characterization platform that enables simultaneous electro-thermal studies in both Transmission Electron Microscopy (TEM) and Scanning Electron Microscopy (SEM) using the same MEMS-based sample carrier. At the core of this system are functionalized MEMS devices—known as Nano-Chips—equipped with up to eight electrodes for precise and concurrent electrical biasing and localized heating of semiconductor samples under real-time operating conditions
See more of: Poster Session
See more of: Poster Session