Die Level Fault Isolation - Lateral Resolution Improvement of Lock-in OBIRCH by Deconvoluting Heat Diffusion
Die Level Fault Isolation - Lateral Resolution Improvement of Lock-in OBIRCH by Deconvoluting Heat Diffusion
Wednesday, November 19, 2025
Summary:
A data processing algorithm that can break a SNR vs. spatial resolution trade-off in Lock-in OBIRCH was introduced. This algorithm eliminates overlapping among signals caused by significant heat diffusion in low lock-in frequency by deconvoluting heat diffusion. Lock-in OBIRCH data was collected on a test sample followed by data processing, which confirmed the benefit of this algorithm.
A data processing algorithm that can break a SNR vs. spatial resolution trade-off in Lock-in OBIRCH was introduced. This algorithm eliminates overlapping among signals caused by significant heat diffusion in low lock-in frequency by deconvoluting heat diffusion. Lock-in OBIRCH data was collected on a test sample followed by data processing, which confirmed the benefit of this algorithm.