Advanced STEM EBIC: Concepts and Applications
Advanced STEM EBIC: Concepts and Applications
Wednesday, November 19, 2025: 8:00 AM
1 (Pasadena Convention Center)
Summary:
Electron beam-induced current imaging (EBIC) is an electrical analysis technique most often performed in the scanning electron microscope (SEM). While it has been extended the transmission electron microscope (TEM), the results obtained with scanning TEM (STEM) EBIC have historically been comparable to SEM EBIC. However, recent hardware and technique developments have rejuvenated the technique, engendering the field of “advanced” STEM EBIC. These advanced techniques include new modes of EBIC contrast and metrology, higher spatial resolution, operando STEM EBIC experimentation, and more robust analysis. In this tutorial we will discuss recent developments in STEM EBIC acquisition and experimentation, and how these capabilities differ from more traditional EBIC measurements. We will also discuss strategies for sample preparation and in situ experimentation and present examples of advanced STEM EBIC characterization on various electronic systems, including commercially available semiconductor devices.
Electron beam-induced current imaging (EBIC) is an electrical analysis technique most often performed in the scanning electron microscope (SEM). While it has been extended the transmission electron microscope (TEM), the results obtained with scanning TEM (STEM) EBIC have historically been comparable to SEM EBIC. However, recent hardware and technique developments have rejuvenated the technique, engendering the field of “advanced” STEM EBIC. These advanced techniques include new modes of EBIC contrast and metrology, higher spatial resolution, operando STEM EBIC experimentation, and more robust analysis. In this tutorial we will discuss recent developments in STEM EBIC acquisition and experimentation, and how these capabilities differ from more traditional EBIC measurements. We will also discuss strategies for sample preparation and in situ experimentation and present examples of advanced STEM EBIC characterization on various electronic systems, including commercially available semiconductor devices.