Power Devices (Si, SiC, GaN) - Investigation of early photon emission (PEM) in GaN-on-Si HEMTs, part I

Wednesday, November 19, 2025
Mr. Greg Johnson , Carl Zeiss Microscopy, Poughkeepsie, OH
Mr. Andreas Rummel , Kleindiek Nanotechnik GmbH, Reutlingen, Baden-Württemberg, Germany
Dr. Heiko Stegmann , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Ms. Hyun Hwa Kim , Carl Zeiss Microscopy, Oberkochen, Oberkochen, Germany
Mr. Kevin A. Distelhurst, BS/MS EE , GLOBALFOUNDRIES, Essex Jct,, VT
N/A Josh Joy , GlobalFoundries, Essex Junction, VT

Summary:

A study is undertaken to examine the possibility of further improving the reliability of GaN-on-Si HEMTs by means of defect localization and physical characterization. A phenomenon of early photon emission (PEM) spots was observed on a (good) commercially available, GaN device. STEM lamellae were collected of areas on and off a PEM spot show no difference in dislocation count. This paper represents the first part of this study, examination in STEM cross sections.
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