Investigating Decap LVP for On-Die Dynamic Voltage Droop Measurement
Investigating Decap LVP for On-Die Dynamic Voltage Droop Measurement
Monday, November 17, 2025: 11:30 AM
3 (Pasadena Convention Center)
Summary:
Laser voltage probing of decap fill cells in standard-cell logic is explored for on-die measurement of dynamic voltage droop and other applications. These FinFET based decaps offer unprecedented access to the local power grid for making non-contact noise measurements because they are widespread in modern CMOS logic ICs. Compared to logic cells, their waveform interpretation is simplified because they are non-switching and less impacted by signal crosstalk. Examples of this novel use of decaps will be provided for 5 nm test vehicles. Possible methods for voltage calibration will be discussed, along with other potential applications of decap laser voltage probing and imaging.
Laser voltage probing of decap fill cells in standard-cell logic is explored for on-die measurement of dynamic voltage droop and other applications. These FinFET based decaps offer unprecedented access to the local power grid for making non-contact noise measurements because they are widespread in modern CMOS logic ICs. Compared to logic cells, their waveform interpretation is simplified because they are non-switching and less impacted by signal crosstalk. Examples of this novel use of decaps will be provided for 5 nm test vehicles. Possible methods for voltage calibration will be discussed, along with other potential applications of decap laser voltage probing and imaging.