All-In-One Nanoprobing Technique on Advance Technology Node FEOL
All-In-One Nanoprobing Technique on Advance Technology Node FEOL
Tuesday, October 6, 2026: 10:10 AM
205 (Henry B. González Convention Center)
Summary:
Development of an All-in-One (AIO) nanoprobing methodology for advanced technology node failure analysis, reducing Nanoprobing complexity, minimizing contact damage, and enabling more efficient SRAM and transistor characterization across both MEOL and FEOL structures.
Development of an All-in-One (AIO) nanoprobing methodology for advanced technology node failure analysis, reducing Nanoprobing complexity, minimizing contact damage, and enabling more efficient SRAM and transistor characterization across both MEOL and FEOL structures.