Laser Scanning Optical PhotoThermal InfraRed (O-PTIR) Microscopy Accelerates Microelectronics Contaminants Identification and Chemical Imaging
Laser Scanning Optical PhotoThermal InfraRed (O-PTIR) Microscopy Accelerates Microelectronics Contaminants Identification and Chemical Imaging
Wednesday, October 7, 2026: 9:40 PM
Summary:
Identifying foreign matters of sub-10 micron size and chemical complexities poses challenges for modern microelectronics manufacturing. Conventional vibrational spectroscopy tools such as FTIR and Raman have their limitations in spatial resolution or sensitivity. We here describe how optical photothermal infrared (O-PTIR) overcomes the limitations of conventional FTIR and Raman and the latest laser-scanning O-PTIR for fast chemical imaging of foreign matters. We will also introduce an automated particle detection and identification module to speed up failure analysis.
Identifying foreign matters of sub-10 micron size and chemical complexities poses challenges for modern microelectronics manufacturing. Conventional vibrational spectroscopy tools such as FTIR and Raman have their limitations in spatial resolution or sensitivity. We here describe how optical photothermal infrared (O-PTIR) overcomes the limitations of conventional FTIR and Raman and the latest laser-scanning O-PTIR for fast chemical imaging of foreign matters. We will also introduce an automated particle detection and identification module to speed up failure analysis.