A Novel Accurate Thickness Measurement Method Using Specific Structure within a DRAM Sample and Tilt Adjustment
A Novel Accurate Thickness Measurement Method Using Specific Structure within a DRAM Sample and Tilt Adjustment
Thursday, October 8, 2026: 9:00 AM
Summary:
Accurate thickness control of TEM lamella is critical for reliable analysis, as it directly affects imaging contrast, resolution, and analytical accuracy. However, conventional thickness measurement techniques such as EELS, EFTEM, STEM intensity-based methods, and FIB-SEM imaging often require expensive equipment, complex procedures, or provide limited accuracy. In this study, a novel method for quantitatively measuring specimen thickness using a conventional TEM system without additional equipment is proposed. The method utilizes the change in projected width induced by specimen tilting and the associated trigonometric relationships to calculate thickness from the actual feature width and tilt angle. Simulation results demonstrate strong agreement between calculated and actual thickness values across various tilt conditions. Experimental validation using a DRAM sample shows consistent thickness estimation, with stable convergence and low variation. This approach enables fast, cost-effective, and reliable thickness measurement, improving efficiency and reliability in TEM analysis workflows.
Accurate thickness control of TEM lamella is critical for reliable analysis, as it directly affects imaging contrast, resolution, and analytical accuracy. However, conventional thickness measurement techniques such as EELS, EFTEM, STEM intensity-based methods, and FIB-SEM imaging often require expensive equipment, complex procedures, or provide limited accuracy. In this study, a novel method for quantitatively measuring specimen thickness using a conventional TEM system without additional equipment is proposed. The method utilizes the change in projected width induced by specimen tilting and the associated trigonometric relationships to calculate thickness from the actual feature width and tilt angle. Simulation results demonstrate strong agreement between calculated and actual thickness values across various tilt conditions. Experimental validation using a DRAM sample shows consistent thickness estimation, with stable convergence and low variation. This approach enables fast, cost-effective, and reliable thickness measurement, improving efficiency and reliability in TEM analysis workflows.