SEM-based Nanoprobing and Active Voltage Contrast in Advanced GAA Device FA

Tuesday, October 6, 2026: 11:10 AM
Dr. Jochonia Nxumalo , IBM Research Albany, Albany, NY
Dr. Qianheng Du , IBM, Albany, NY
Dr. Zhigang Song , IBM, Hopewell Junction, NY
Mr. Michael Iwatake , IBM, Albany, NY
Dr. Yu Zhu , IBM, Albany, NY
Ms. Shitong Wu , IBM, Albany, NY
Dr. Victor Chan , IBM Research Albany, Albany, NY
Dr. Chris Sheraw , IBM Research Albany, Albany, NY

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