SEM-based Nanoprobing and Active Voltage Contrast in Advanced GAA Device FA

Tuesday, October 6, 2026: 10:50 AM

205 (Henry B. González Convention Center)

Dr. Jochonia Nxumalo , IBM Research Albany, Albany, NY

Dr. Qianheng Du , IBM, Albany, NY

Dr. Zhigang Song , IBM, Hopewell Junction, NY

Mr. Michael Iwatake , IBM, Albany, NY

Dr. Yu Zhu , IBM, Albany, NY

Ms. Shitong Wu , IBM, Albany, NY

Dr. Victor Chan , IBM Research Albany, Albany, NY

Dr. Chris Sheraw , IBM Research Albany, Albany, NY