Imaging Dopant Interfaces in 5 nm-node finFETs with STEM EBIC

Thursday, October 8, 2026: 8:20 AM
William A Hubbard, PhD , NanoElectronic Imaging, Inc., Riverside, CA
Dr. Heiko Stegmann , Carl Zeiss Microscopy GmbH, Oberkochen, Germany
Ms. Hyun Hwa Kim , Carl Zeiss Microscopy, Oberkochen, Oberkochen, Germany
Mr. Greg Johnson , Carl Zeiss Microscopy, Poughkeepsie, NY

See more of: Microscopy Analysis and Material Characterization I
See more of: Technical Program