Conductive AFM analyses in SOI
Conductive AFM analyses in SOI
Tuesday, October 6, 2026: 4:20 PM
Summary:
Conductive AFM analyses were evaluated on a commercially available 22FDSOI chip, with both lock-in analysis and milling. A careful examination of results show that the current map, as expected, did not provide much useful results, but that the lock-in components of both phase and amplitude nicely highlighted the NFET contacts (GND and BL). The tomographic milling with the same tip was also able to create smooth surfaces underneath the surface. A short SEM beam exposure with milling also cleaned up the sample and created some oxide recess to accentuate contacts.
Conductive AFM analyses were evaluated on a commercially available 22FDSOI chip, with both lock-in analysis and milling. A careful examination of results show that the current map, as expected, did not provide much useful results, but that the lock-in components of both phase and amplitude nicely highlighted the NFET contacts (GND and BL). The tomographic milling with the same tip was also able to create smooth surfaces underneath the surface. A short SEM beam exposure with milling also cleaned up the sample and created some oxide recess to accentuate contacts.