Dr. Heiko Stegmann

EMEA Applications Support Crossbeam
Carl Zeiss Microscopy GmbH
Oberkochen, Oberkochen
Italy 73447

Papers:

Basics and Current Aspects of Scanning Electron Microscopy
Three-dimensional simulation of FIB-SEM image series from layout data for automatic FIB endpoint detection
Imaging Dopant Interfaces in 5 nm-node finFETs with STEM EBIC