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| Microscopy Tools 2 | ||||
| Location: South Ballroom (Worcester's Centrum Centre) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Editors: | Mr. David Vallett IBM Systems and Technology Group, Essex Jct., VT Dr. William Vanderlinde Laboratory for Physical Sciences, College Park, MD | |||
| Session Chairs: | Dr. JoAn Hudson University of Oregon, Eugene, OR Mr. Chris Richardson Abound Solar, Fort Collins, CO | |||
| 12:15 PM | Lunch | |||
| 1:15 PM | Materials Characterization for Failure Analysis | |||
| 2:45 PM | TEM for Failure Analysis of Integrated Circuits | |||
| 3:30 PM | Sample Preparation and Analysis Using 3D Tomography, Holography, EBIC and Annular Dark Field STEM | |||
| 4:15 PM | Break | |||
| 4:30 PM | FIB Applications Device Edits and Analytical | |||
| 5:30 PM | Ultra-High Resolution Scanning Electron Microscopy | |||