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Session 5: Circuit-Edit
Location: Meeting Room E145 (Oregon Convention Center )
(Please check final room assignments on-site).
Session Description:

Session Chairs:Mr. Kultaransingh (Bobby) Hooghan FEI KAUST, Saudi Arabia
Mr. Steven Herschbein IBM Systems & Technology, Hopewell Junction, NY
3:10 PMManufacturing In-Line Whole Wafer Focused Ion Beam (FIB) Memory Address Descramble Verification
3:35 PMAn Analysis of Tungsten FIB-made Via Resistance
4:00 PMBackside Circuit Edit on Full-Thickness Silicon Devices
4:25 PMBreak
4:35 PMInsulator Deposition for Through Conductor Editing
5:00 PMCreation of Solid Immersion Lenses in Bulk Silicon Using Focused Ion Beam Backside Editing Techniques
5:25 PMBreak