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The 35th International Symposium for Testing and Failure Analysis (November 15-19, 2009) of ASM |
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| Session 3: Nanoprobing | ||||
| Location: Meeting Room J3 (San Jose McEnery Convention Center) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: Nanoprobing includes applications in the use of mechanical contact probes for electrical or other access to circuitry at the nanoscale. | ||||
| Session Chairs: | Mr. Taylor Cavanah DCG Systems, Inc, TX Dr. Peter Harris Multiprobe, Inc, Santa Barbara, CA | |||
| 1:30 PM | Nanoprobe Capacitance-Voltage Spectroscopy (NCVS) Localization of 45nm SOI SRAM Array Bit Line Failure | |||
| 1:55 PM | The SRAM Soft Failure Analysis with SNM & TR Characterization by Nanoprobing in Sub 45nm | |||
| 2:20 PM | Electrical Characterization of Different Failure Modes in Sub-100 Nm Devices Using Nanoprobing Technique | |||
| 2:45 PM | A Transistor Level Failure Analysis Via Nano- Probing and Junction Stain TEM to Reveal 65nm Device Lightly Doped Drain Profile Abnormality | |||
| 3:10 PM | FAMOS Fail Bit Verification /Characterization Via NanoProbe | |||