39th International Symposium for Testing and Failure Analysis (November 3 – 7, 2013)

November 03 - 07, 2013

H Tan

Globalfoundries Singapore Pte. Ltd.
Technology Development-New Technology Prototyping
Globalfoundries Singapore Pte. Ltd., 60 Woodlands Industrial Park D Street 2,
Singapore 738406.
Singapore Singapore 738406

Papers:
10.4 Surface Treatment for 20nm SRAM Devices to Overcome Tip Curvature Radius Limitation in Conductive AFM Analysis 10.6 Die Level Defect Analysis Using Combined Techniques of AFP with Electron Microscopes 10.10 UV-Raman Microscopy On the Analysis of Ultra-Low-k Dielectric Materials On Patterned Wafers 13.2 Cross Sectional Focus Ion Beam Top-Down Delayering