Inline Defects Overlaying with Functional Failures and Characterization for Fast Defect Learning and Fast Yield Improvement

Tuesday, November 11, 2014: 3:50 PM
310 B (George R. Brown Convention Center )
Dr. Zhigang Song , IBM Systems & Technology, Hopewell Junction, NY
Dr. Oliver D. Patterson , IBM Systems & Technology, Hopewell Junction, NY
Dr. Qian Xu , IBM Systems & Technology, Hopewell Junction, NY