Case Studies and the Failure Analysis Process I
Tuesday, November 11, 2014: 2:35 PM-4:40 PM
310 B (George R. Brown Convention Center )
Session Chairs:
Dr. Zhigang Song
and
Prof. Peter Jacob
2:35 PM
Understanding the Cu Void Formation by TEM Failure Analysis
Dr. Binghai Liu, GLOBALFOUNDRIES Singapore;
Dr. Jie Zhu, GLOBALFOUNDRIES Singapore;
Mr. Eddie Er, GLOBALFOUNDRIES Singapore;
Dr. Si Ping Zhao, Globalfoundries Singapore;
Dr. Jeffrey Lam, GLOBALFOUNDRIES;
Dr. Changqing Chen, Globalfoundries Singapore;
Mr. Mark Najarian, FEI
3:00 PM
Failure Analysis Methodology on Systematic Missing Cu in RAM Due to Cu CMP
Mr. Ang Ghim Boon, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Changqing Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. Hui Peng Ng, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Alfred C.T. Quah, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. Angela Teo, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. Kim Hong Yip, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. Soh Ping Neo, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Jeffrey Lam, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Zhihong Mai, GLOBALFOUNDRIES Singapore Pte Ltd
