A Systematic Method for the Physical Isolation of a Die in a Stacked-Die Configuration

Tuesday, November 11, 2014: 9:15 AM
310 A (George R. Brown Convention Center )
Ms. Vivian Jang , Texas Instruments, Dallas, TX
Mr. Ken C. Sias , Texas Instruments, Dallas, TX

Summary:

With the increasing prevalence of stacked dies in the semiconductor industry, failure analysts have been facing a novel challenge since conventional destructive physical analysis methods could no longer be directly applied to identify the root cause of failure. This paper will aim to discuss a highly reliable and systematic method for physically isolating a die in a stacked die configuration.
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