Application of Automated FIB for TEM Sample Preparation in Semiconductor Failure Analysis

Thursday, November 13, 2014: 8:00 AM
310 A (George R. Brown Convention Center )
Dr. Jie Zhu , GLOBALFOUNDRIES Singapore, Singapore, Singapore
Dr. Si Ping Zhao , GLOBALFOUNDRIES Singapore, Singapore, Singapore
Mr. Mark Najarian , FEI, SARATOGA SPRINGS, NY

Summary:

This work describes applicaiton of iFast automation system on FIB dual-beam system for TEM sample preparation.
See more of: Sample Preparation and Device Deprocessing II
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