Failure Analysis Methodology on Systematic Missing Cu in RAM Due to Cu CMP

Tuesday, November 11, 2014: 3:00 PM
310 B (George R. Brown Convention Center )
Mr. Ang Ghim Boon , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Changqing Chen , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Ms. Hui Peng Ng , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Alfred C.T. Quah , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Ms. Angela Teo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. Kim Hong Yip , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Ms. Soh Ping Neo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Jeffrey Lam , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Zhihong Mai , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore

See more of: Case Studies and the Failure Analysis Process I
See more of: Symposium