TEM Sample Preparation Methods for MEMS Floating Structure Analysis

Thursday, November 13, 2014: 2:30 PM
310 A (George R. Brown Convention Center )
Dr. Huisheng Yu , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China
Shuqing Duan , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China
Ming Li , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China

See more of: Sample Preparation and Device Deprocessing IV
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