Sample Preparation and Device Deprocessing IV

Thursday, November 13, 2014: 2:30 PM-3:20 PM
310 A (George R. Brown Convention Center )
Session Chairs:
Mr. Roger Alvis and Mr. Bryan Tracy
2:30 PM
TEM Sample Preparation Methods for MEMS Floating Structure Analysis
Dr. Huisheng Yu, Semiconductor Manufacturing International (Shanghai) Corp.; Shuqing Duan, Semiconductor Manufacturing International (Shanghai) Corp.; Ming Li, Semiconductor Manufacturing International (Shanghai) Corp.
2:55 PM
Cross-Section Sample Preparation Method for Imaging Dopant Related Anomalies Using Scanning Probe Microscopy Techniques
Dr. Sam Subramanian, Freescale Semiconductor Inc.; Mrs. Khiem ly, Freescale Semiconductor Inc.; Mr. Tony Chrastecky, Freescale Semiconductor Inc.
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