A Novel Method for the Specified Site Planar View TEM Sample Preparation

Thursday, November 13, 2014: 9:50 AM
310 A (George R. Brown Convention Center )
Mrs. Shuqing Duan , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China
Yanli Zhao , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China
Ming Li , Semiconductor Manufacturing International (Shanghai) Corp., Shanghai, China

Summary:

This paper reports a novel method for specified site planar view transmission electron microscopy (TEM) sample preparation.
See more of: Sample Preparation and Device Deprocessing III
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