Effective and Efficient FEOL Defects Localization/ Inspection By Selective Mechanical/Chemical Deprocessing

Wednesday, November 12, 2014: 3:55 PM
310 A (George R. Brown Convention Center )
Mrs. Ng Hui Peng , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Ms. Angela Teo , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. Ang Ghim Boon , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. Kim Hong Yip , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Chang Qing Chen , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Alfred C.T. Quah , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Mr. Tam Yong Seng , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Jeffrey Lam , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore
Dr. Zhihong Mai , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore

See more of: Sample Preparation and Device Deprocessing I
See more of: Symposium