Sample Preparation and Device Deprocessing I
Wednesday, November 12, 2014: 3:30 PM-5:35 PM
310 A (George R. Brown Convention Center )
Session Chairs:
Mr. Roger Alvis
and
Mr. Bryan Tracy
3:55 PM
Effective and Efficient FEOL Defects Localization/ Inspection By Selective Mechanical/Chemical Deprocessing
Mrs. Ng Hui Peng, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. Angela Teo, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. Ang Ghim Boon, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. Kim Hong Yip, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Chang Qing Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Alfred C.T. Quah, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. Tam Yong Seng, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Jeffrey Lam, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Zhihong Mai, GLOBALFOUNDRIES Singapore Pte Ltd
5:10 PM
Application of Fast Laser Deprocessing Techniques in Physical Failure Analysis on SRAM Memory of Advance Technology
Mr. H.H. Yap, Global Foundries;
P. K. Tan, Globalfoundries Singapore Pte Ltd.;
Mr. G.R. Low, Globalfoundries Singapore Pte. Ltd.;
Dr. M. K. Dawood, Globalfoundries Singapore Pte. Ltd.;
Mr. Hua Feng, GLOBALFOUNDRIES Singapore Pte. Ltd;
Mr. Y.Z. Zhao, Global Foundries;
Mr. R. He, Globalfoundries Singapore Pte. Ltd.;
H. Tan, Globalfoundries Singapore Pte. Ltd.;
Dr. Yamin Huang, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Dandan Wang, GLOBALFOUNDRIES Singapore Pte. Ltd;
Mr. Y. Zhou, Global Foundries;
Mr. Pariyarathu Salimon Limin, Globalfoundries Singapore Pte. Ltd.;
Ms. Sabitha James, Globalfoundries Singapore Pte. Ltd.;
Dr. Jeffrey Lam, GLOBALFOUNDRIES;
Dr. Z.H. Mai, GLOBALFOUNDRIES Singapore Pte Ltd
