Utilizing Nanoprobing and Circuit Diagnostics to Identify Key Failure Mechanism of Otherwise Non-Visible Defects in 20nm Logic Devices

Tuesday, November 11, 2014: 10:45 AM

310 B (George R. Brown Convention Center )

Dr. M. K. Dawood , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Dr. Changqing Chen , Globalfoundries Singapore, Singapore, Singapore

Mr. P.K. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Ms. Sabitha James , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. Pariyarathu Salimon Limin , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

H. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. H.H. Yap , Global Foundries, Singapore, Singapore

Mr. G.R. Low , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

J. C. Lam , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore

Dr. Z.H. Mai , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore

Mr. Dayanand Nagalingam , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore