Investigation of Protection Layer Materials for Ex-situ 'lift-out' TEM sample Preparation Technique with FIB for 14nm FinFET

Thursday, November 13, 2014: 10:15 AM

310 A (George R. Brown Convention Center )

Mr. Hua Feng , GLOBALFOUNDRIES Singapore Pte. Ltd, Singapore, Singapore

Mr. G.R. Low , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. P.K. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. Y.Z. Zhao , Global Foundries, Singapore, Singapore

Mr. H.H. Yap , Global Foundries, Singapore, Singapore

Dr. M. K. Dawood , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Mr. Y. Zhou , Global Foundries, Singapore, Singapore

Dr. Anyan Du , GLOBALFOUNDRIES Singapore, Singapore, Singapore

Dr. Changqing Chen , Globalfoundries Singapore, Singapore, Singapore

H. Tan , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Dr. Yamin Huang , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore

Dr. Dandan Wang , GLOBALFOUNDRIES Singapore Pte. Ltd, Singapore, Singapore

Dr. Jeffrey Lam , Globalfoundries Singapore Pte. Ltd., Singapore, Singapore

Dr. Z.H. Mai , GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore