Cross-Section Sample Preparation Method for Imaging Dopant Related Anomalies Using Scanning Probe Microscopy Techniques

Thursday, November 13, 2014: 2:55 PM
310 A (George R. Brown Convention Center )
Dr. Sam Subramanian , Freescale Semiconductor Inc., Austin, TX
Mrs. Khiem ly , Freescale Semiconductor Inc., Austin, TX
Mr. Tony Chrastecky , Freescale Semiconductor Inc., Austin, TX

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