Novel NIR Camera with Extended Sensitivity and Low Noise for Photon Emission Microscopy of VLSI Circuits

Monday, November 10, 2014: 10:00 AM
Grand Ballroom B (George R. Brown Convention Center )
Dr. Andrea Bahgat Shehata , IBM T.J. Watson Research Center, Yorktown Heights, NY
Dr. Franco Stellari , IBM Research, Yorktown Heights, NY
Alan Weger , IBM Research, Yorktown Heights, NY
Dr. Peilin Song , IBM T.J. Watson Research Center, Yorktown Heights, NY
Dr. Herve Deslandes , DCG Systems, Fremont, CA
Dr. Ted R. Lundquist , DCG Systems, Inc, Fremont, CA
Dr. Euan Ramsay , DCG Systems, Fremont, CA

Summary:

This work presents a new photon emission microscopy camera prototype for the acquisition of intrinsic light emitted from VLSI circuits during their normal operation. This novel camera was designed to be sensitive to longer wavelengths in order to maximize the signal intensities from modern VLSI chips which are characterized by a red shift in the intrinsic emission spectrum. In this paper, we will characterize the performance of the camera using 32 nm and 22 nm SOI chips. The novel camera is able to collect emission images with the circuit under test operating at a supply voltage down to 0.5 V, exceeding the performances of a state-of-the-art InGaAs camera.
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