Incorporating a Compact Scan Diagnostic System Enhances the Failure Analysis Flow

Thursday, November 13, 2014: 8:00 AM
310 B (George R. Brown Convention Center )
Mr. Rommel Estores , ON Semiconductor, Oudenaarde, Belgium
Pascal Vercruysse , ON Semiconductor, Oudenaarde, Belgium
Karl Villareal , ON Semiconductor, Oudenaarde, Belgium
Mr. Eric Barbian , ON Semiconductor, Phoenix, AZ
Mr. Ralph Sanchez , Teseda, Portland, OR
Mr. Rich Ackerman , Teseda, Portland, OR

Summary:

This paper demonstrates the incorporation of new scan diagnosis methods in the overall analysis flow for digital functionality failures leading to an enhanced failure analysis methodology. For the testing and diagnosis of the cases presented, compact but powerful scan test hardware with its diagnosis software was used. This compact hardware system fits inside of an FA tool chamber for device stimulus and can, therefore, be easily combined with the traditional FA techniques such as Emission Microscopy and Dynamic Analysis by Laser Stimulation(DALS)to perform dynamic fault localization. The scan diagnosis software tools not only provide fast characterization and diagnosis of the failing behavior, but also in the comprehensive circuit and layout analysis. These flow enhancements provide the Failure Analyst a means to perform comprehensive digital analysis/diagnosis that significantly reduces the cycle time in isolating defects.