Dr. Zhihong Mai
Dr. Zhihong Mai
Principal Engineer
GLOBALFOUNDRIES Singapore Pte Ltd
Product, Test and Failure Analysis
60 Woodlands Industrial Park D Street 2, Singapore 738406
Singapore
Singapore
738406
Papers:
Failure Analysis Methodology on Systematic Missing Cu in RAM Due to Cu CMP
Effective and Efficient FEOL Defects Localization/ Inspection By Selective Mechanical/Chemical Deprocessing