Mr. P.K. Tan
Mr. P.K. Tan
Senior Principal Engineer
Globalfoundries Singapore Pte. Ltd.
Technology Development-New Technology Prototyping
Globalfoundries Singapore Pte. Ltd., 60 Woodlands Industrial Park D Street 2,
Singapore 738406.
Singapore
Singapore
738406
Papers:
Utilizing Nanoprobing and Circuit Diagnostics to Identify Key Failure Mechanism of Otherwise Non-Visible Defects in 20nm Logic Devices
Investigation of Protection Layer Materials for Ex-situ 'lift-out' TEM sample Preparation Technique with FIB for 14nm FinFET