5.2
Unique Approaches to Isolate Nano-scale Defect in Snake-Comb Test Structure
Unique Approaches to Isolate Nano-scale Defect in Snake-Comb Test Structure
Monday, November 2, 2015: 2:15 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Summary:
The clever use of electrical resistance measurement and calculation, defect search by FIB XPVC observation, P-STEM for further isolation and X-STEM successfully found a nano-scale defect, single metallic stringer in a snake-comb test structure. The approaches described in this paper, have proved their capability in finding nano-scale defects with reliable results. These techniques have expanded the failure analysis world to the role of defect localization and root cause identification. With the increasing degree of integration and scaling, the need of such techniques has become more prominent in the failure analysis world.
The clever use of electrical resistance measurement and calculation, defect search by FIB XPVC observation, P-STEM for further isolation and X-STEM successfully found a nano-scale defect, single metallic stringer in a snake-comb test structure. The approaches described in this paper, have proved their capability in finding nano-scale defects with reliable results. These techniques have expanded the failure analysis world to the role of defect localization and root cause identification. With the increasing degree of integration and scaling, the need of such techniques has become more prominent in the failure analysis world.