11.1
In-Line Detection of Deep Trench Moat Underetch Defects Using E-beam Inspection
Wednesday, November 4, 2015: 8:00 AM
Meeting Room D139 & 140 (Oregon Convention Center )
Mr. Richard Hafer
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Brian Messenger
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Mark Dekker
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Oliver D. Patterson
,
GLOBALFOUNDRIES, Hopewell Junction, NY
Mr. Xiaohu Tang
,
Hermes Microvision Inc, San Jose, CA
Mr. Shuen-Cheng Lei
,
Hermes Microvision Inc, San Jose, CA
Yi Feng
,
GLOBALFOUNDRIES, Hopewell Junction, NY
