6.3
In-Situ Infrared Microscope for a Focused Ion Beam Workstation: Circuit Edit and Backside Edit Applications

Monday, November 2, 2015: 3:05 PM
Meeting Room D137 & 138 (Oregon Convention Center )
Mr. Matthew Weschler , Technical Sales Solutions LLC, Beaverton, OR
Mr. Michael Durller , Battelle Memorial Institute, Columbus, OH
Mr. Alexander Richards , Technical Sales Solutions LLC, Beaverton, OR

Summary:

This talk will review further details of the design and implementation of the NIR camera system on the FEI FIB 200, with a focus on the use for visualization of buried structures, non-destructive real time AOI location and endpoint detection. Special focus in the paper will be given to the use of the micro optical camera system for assistance during CE and other typical FIB milling activities.