6
FIB Circuit Analysis and Edit

Monday, November 2, 2015: 2:15 PM-3:30 PM
Meeting Room D137 & 138 (Oregon Convention Center )
Session Chairs:  Dr. Michael DiBattista, Qualcomm, Inc., San Diego, CA and Mr. Jason M. Benz, BS/MS Microelectronic Eng & Materials Science, Globalfoundries, Essex Jct., VT
2:15 PM
6.1
Alleviating Sample Charging during FIB Operation
Dr. Qing Liu, Nanyang Technological University; Ms. H. B. Kor, Nanyang Technological University; Ms. Y. W. Siah, Nanyang Technological University; Prof. Chee Lip Gan, Nanyang Technological University
2:40 PM
6.2
Circuit Tracing on an Integrated Circuit using FIB Passive Voltage Contrast effect
Mr. Alexander Sorkin, Techinsights; Mr. Christopher A. Pawlowicz, Techinsights; Mr. Alex Krechmer, Techinsights; Mr. Michael W. Phaneuf, Fibics Incorporated
3:05 PM
6.3
In-Situ Infrared Microscope for a Focused Ion Beam Workstation: Circuit Edit and Backside Edit Applications
Mr. Matthew Weschler, Technical Sales Solutions LLC; Mr. Michael Durller, Battelle Memorial Institute; Mr. Alexander Richards, Technical Sales Solutions LLC
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