21.4
Invisible Defect Root Cause Identification with Electrical and Chemical Analyses

Thursday, November 5, 2015: 1:55 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Dr. Zhigang Song , GLOBALFOUNDRIES, Hopewell Junction, NY
Dr. Yunyu Wang , GLOBALFOUNDRIES, Hopewell Junction, NY
Ms. Sweta Pendyala , GLOBALFOUNDRIES, Hopewell Junction, NY

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