21
Case Studies and FA Process
Thursday, November 5, 2015: 12:40 PM-2:20 PM
Meeting Room D139 & 140 (Oregon Convention Center )
Session Chairs: Dr. Zhigang Song, GLOBALFOUNDRIES, Hopewell Junction, NY and Mrs. Rose Ring, Quality, GLOBALFOUNDRIES Malta, Saratoga Springs, NY
12:40 PM
Resistive Contrast Imaging, the Tool, Technique, and Applications on Leading-edge Semiconductor Technology Devices
Mrs. Rosalinda-Mendoza Ring, GLOBALFOUNDRIES Malta;
Mr. Andreas Rummel, Kleindiek Nanotechnik;
Edward C. Carper, FEI Company;
Randy Newkirk, GLOBALFOUNDRIES Malta;
Kevin Davidson, GLOBALFOUNDRIES Malta;
James Capriola, GLOBALFOUNDRIES Malta;
Dr. Jeremy D. Russell, GLOBALFOUNDRIES
1:05 PM
Failure Analysis Methodology on Circular Patch Functional Failure due to Device Parametric Drift
Dr. Alfred C.T. Quah, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. C.Q. Chen, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. Ghim Boon Ang, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. D. Nagalingam, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. H.P. Ng, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. P.T. Ng, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. SeungJe Moon, GLOBALFOUNDRIES Singapore Pte Ltd;
Ms. Angela Teo, GLOBALFOUNDRIES Singapore Pte Ltd;
Mr. K.H. Yip, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Jeffrey Lam, GLOBALFOUNDRIES Singapore Pte Ltd;
Dr. Z.H. Mai, GLOBALFOUNDRIES Singapore Pte Ltd
1:30 PM
Failure Analysis of ILD Delamination – Uncovering Multiple Root Causes
Dr. Marie Castignolles, Freescale Semiconductor, Inc.;
Mr. Thomas Zirilli, Freescale Semiconductor, Inc.;
Mr. Eric Cattey, Freescale Semiconductor, Inc.;
Mr. Justin C Lewenstein, Freescale Semiconductor, Inc.;
Dr. Stephen N Schauer, Freescale Semiconductor, Inc.;
Dr. Wei Liu, Freescale Semiconductor, Inc.;
Mr. Jianfeng Chen, Freescale Semiconductor, Inc.;
Mr. Jacob Hammett, Freescale Semiconductor, Inc.;
Dr. Sam Subramanian, Freescale Semiconductor, Inc.
